High-Precision XY Stage Motion Control of Industrial Microscope
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: IEEE Transactions on Industrial Electronics
سال: 2019
ISSN: 0278-0046,1557-9948
DOI: 10.1109/tie.2018.2838102